Process

Temperature (K)

Time (hr)

Pressure (Pa)

Gas Composition (sccm) (N₂:H₂:CH₄)

Power (kW)

Screen Plasma Nitriding (SPN)

653,713

4, 10, 20

20

80:240:0

~35

Screen Plasma Nitro-Carburizing (SPNC)

653,713

4, 10, 20

20

80:240:5

~40